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1

Embedded Co islands on Ge(001)

Harold J.W. Zandvliet, Arie van Houselt, Petra E. Hegeman

Journal:

Surface Science

Year:

2011

Language:

english

File:

PDF, 545 KB

english, 2011

2

Experimental Study of a Shearing Interferometer Concept for At-Wavelength Characterization of Extreme-Ultraviolet Optics

Hegeman, Petra, Christmann, Xavier, Visser, Matthieu, Braat, Joseph

Journal:

Year:

2001

Language:

english

File:

PDF, 442 KB

english, 2001

3

Experimental investigation of criteria for thermal roughening

Petra E. Hegeman, Harold J.W. Zandvliet, Gerard A.M. Kip, Bart A.G. Kersten, Bene Poelsema

Journal:

Surface Science

Year:

1995

Language:

english

File:

PDF, 732 KB

english, 1995

4

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Emerging Lithographic Technologies IV - Characterization of a novel double-gas-jet laser plasma EUV source

de Bruijn, Rene, Bartnik, Andrzej, Fledderus, H. F., Fiedorowicz, Henryk, Hegeman, Petra, Constantinescu, Raluca C., Bijkerk, Fred, Dobisz, Elizabeth A.

Year:

2000

Language:

english

File:

PDF, 626 KB

english, 2000

5

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Extended-source interferometry for at-wavelength testing of EUV optics

Visser, Matthieu, Dekker, Martijn K., Hegeman, Petra, Braat, Joseph J. M., Vladimirsky, Yuli

Year:

1999

Language:

english

File:

PDF, 1.28 MB

english, 1999

6

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Portable diagnostics for EUV light sources

Stuik, R., Constantinescu, Raluca C., Hegeman, Petra, Jonkers, Jeroen, Fledderus, H. F., Banine, Vadim, Bijkerk, Fred, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 552 KB

english, 2000

7

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Laser-generated water plasma source for extreme-ultraviolet lithography and at-wavelength interferometry

Constantinescu, Raluca C., Jonkers, Jeroen, Hegeman, Petra, Visser, Matthieu, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 588 KB

english, 2000

8

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Emerging Lithographic Technologies IV - Shearing interferometer to characterize EUV optics with a laser plasma source

Visser, Matthieu, Constantinescu, Raluca C., Hegeman, Petra, Jonkers, Jeroen, Dekker, Martijn K., Louis, Eric, Hambach, Dirk, Dobisz, Elizabeth A.

Year:

2000

Language:

english

File:

PDF, 2.05 MB

english, 2000

9

Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

van der Meer, Robert, Kozhevnikov, Igor, Krishnan, Balachander, Huskens, Jurriaan, Hegeman, Petra, Brons, Christian, Vratzov, Boris, Bastiaens, Bert, Boller, Klaus, Bijkerk, Fred

Journal:

Year:

2013

Language:

english

File:

PDF, 614 KB

english, 2013